Travel Robot For Moving Substrate Transfer Robot In Vacuum Chamber

ABSTRACT

A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: an elevating part located in a lower outer region of a housing, sealing the vacuum chamber, wherein an elevating drive shaft moves through a vacuum chamber through-hole; a travel arm platform through which coupling holes are formed, wherein the elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.

CROSS REFERENCE OF RELATED APPLICATION

This present application claims the benefit of the earlier filing dateof Korean non-provisional patent application No. 10-2021-0070273, filedMay 31, 2021, the entire contents of which being incorporated herein byreference.

FIELD OF THE DISCLOSURE

The present disclosure relates to a travel robot; and more particularly,to the travel robot that moves a substrate transfer robot within avacuum chamber of a substrate processing equipment, wherein thesubstrate transfer robot is used for transferring substrates inside thevacuum chamber.

BACKGROUND OF THE DISCLOSURE

In general, a substrate such as a wafer for a semiconductor device, aglass substrate for a display device, or a glass substrate for a thinfilm solar cell is manufactured by performing various processes on thesubstrate. During these processes, the substrate is loaded and processedin a substrate processing equipment that provides optimal conditions foreach of the processes.

Nowadays, in order to improve productivity, a cluster-type substrateprocessing equipment capable of collectively processing the substrate isbeing developed and used.

The cluster-type substrate processing equipment includes a load lockchamber for storing the substrate, a transfer chamber for transferringthe substrate, and a plurality of process chambers for performing eachmanufacturing process.

Additionally, a substrate transfer robot, installed in the transferchamber that is in a vacuum state, may transfer the substrate back andforth between the transfer chamber and the load lock chamber, amongmultiple transfer chambers, or in and out of the process chambers.

Recently, in order to cope with a large size of the substrate and toimprove a substrate processing capability, various researches are inprogress to change a structure that processes two substrates in oneprocess chamber or an octagonal structure in which four process chambersare installed at equal distances around the transfer chamber to atetragonal structure having the processing chambers installed on bothsides of a transfer path of the transfer chamber.

Especially, in order to deal with an offset distance between respectivelocations of the two substrates in a structure where they are positionedwithin one process chamber or in order to account for install locationsof each of the process chambers in the tetragonal structure, shifting ofa position of the substrate transfer robot is inevitably required.

To this end, a method such as installing rails and the like as thetransport path within the transfer chamber and moving the substratetransfer robot along the transport path is being suggested.

However, since the installment of the transport path such as the railswithin the transfer chamber requires additional structures for formingthe transport path within the transfer chamber first in prior toinstalling the substrate transfer robot on top of the additionalstructures, it is expected that not only the installment of thesubstrate transfer robot but also subsequent maintenance of thesubstrate transfer robot are highly complicated.

PRIOR ART LITERATURE

(Patent Document 0001) Korean Patent Publication No. 10-2019-0072373 A

(Patent Document 0002) Korean Patent Publication No. 10-2012-0024021 A

SUMMARY OF THE DISCLOSURE

It is an object of the present disclosure to solve all theaforementioned problems.

It is another object of the present disclosure to provide a travel robotcapable of moving a substrate transfer robot in a vacuum chamber.

It is still another object of the present disclosure to facilitate easyinstallation of the travel robot for moving the substrate transfer robotin the vacuum chamber.

It is still yet another object of the present disclosure to facilitateeasy maintenance of the travel robot for moving the substrate transferrobot installed in the vacuum chamber.

It is still yet another object of the present disclosure to provide thetravel robot capable of moving the substrate transfer robot whilemaintaining a vacuum state in the vacuum chamber.

In accordance with one aspect of the present disclosure, there isprovided a travel robot for moving a substrate transfer robot in avacuum chamber, comprising: an elevating part which is located in alower outer region of a housing, sealing an inside of the vacuumchamber, and has its upper end sealed to a vacuum chamber through-holeformed on a lower region of the housing, wherein the elevating partallows an elevating drive shaft having a hollow formed therein to bemoved up and down through the vacuum chamber through-hole; a travel armplatform through which a (1_1)-st coupling hole, a (1-2)-nd couplinghole and a (1_3)-rd coupling hole are formed respectively at a firstcenter area, a first one-end area and a first opposite-end area thereof,wherein a (1_1)-st locking member, through which a (1_1)-st through-holecorresponding to the hollow of the elevating drive shaft is formed,compartmentalizes the (1_1)-st coupling hole into a (1_1)-st upper spacesealed by a (1_1)-st cover and a (1_1)-st lower space, wherein a(1_2)-nd locking member, through which a (1_2)-nd through-hole isformed, compartmentalizes the (1_2)-nd coupling hole into a (1_2)-ndupper space and a (1_2)-nd lower space sealed by a (1_2)-nd cover,wherein a (1_3)-rd locking member, through which a (1_3)-rd through-holeis formed, compartmentalizes the (1_3)-rd coupling hole into a (1_3)-rdupper space and a (1_3)-rd lower space sealed by a (1_3)-rd cover, andwherein the elevating drive shaft inserted into the (1_1)-st lower spaceis fixedly engaged with the (1_1)-st locking member; a first travel armpart including a (1_1)-st travel link arm and a (1_2)-nd travel linkarm, wherein a first travel driving motor and a first speed reducer,interlocked with the first travel driving motor to reduce a rotationalspeed of the first travel driving motor by half, are installed in asealed inner space of the (1_1)-st travel link arm, wherein a (1_1)-stdrive shaft, having a hollow formed therein and interlocked with thefirst speed reducer, and a (1_1)-st output shaft interlocked with the(1_1)-st drive shaft are sealingly installed on a (1_1)-st one-end areaof the (1_1)-st travel link arm, wherein a (1_2)-nd drive shaft, havinga hollow formed therein and interlocked with the first travel drivingmotor, and a (1_2)-nd output shaft interlocked with the (1_2)-nd driveshaft are sealingly installed on a (1_1)-st opposite-end area of the(1_1)-st travel link arm, wherein the (1_1)-st output shaft of the(1_1)-st travel link arm is fixedly engaged with a (1_1)-st linkingmember that is inserted into the (1_2)-nd upper space of the travel armplatform to be fixedly engaged with the (1_2)-nd locking member, andwherein a (1_2)-nd one-end area of the (1_2)-nd travel link arm isfixedly engaged with the (1_2)-nd output shaft of the (1_1)-st travellink arm; a second travel arm part including a (2_1)-st travel link armand a (2_2)-nd travel link arm, wherein a second travel driving motorand a second speed reducer, interlocked with the second travel drivingmotor to reduce a rotational speed of the second travel driving motor byhalf, are installed in a sealed inner space of the (2_1)-st travel linkarm, wherein a (2_1)-st drive shaft, having a hollow formed therein andinterlocked with the second speed reducer, and a (2_1)-st output shaftinterlocked with the (2_1)-st drive shaft are sealingly installed on a(2_1)-st one-end area of the (2_1)-st travel link arm, wherein a(2_2)-nd drive shaft, having a hollow formed therein and interlockedwith the second travel driving motor, and a (2_2)-nd output shaftinterlocked with the (2_2)-nd drive shaft are sealingly installed on a(2_1)-st opposite-end area of the (2_1)-st travel link arm, wherein the(2_1)-st output shaft of the (2_1)-st travel link arm is fixedly engagedwith a (1_2)-nd linking member that is inserted into the (1_3)-rd upperspace of the travel arm platform to be fixedly engaged with the (1_3)-rdlocking member, and wherein a (2_2)-nd one-end area of the (2_2)-ndtravel link arm is fixedly engaged with the (2_2)-nd output shaft of the(2_1)-st travel link arm; and a transfer robot coupling part whosesecond one-end area is rotatably engaged with a (1_2)-nd opposite-endarea of the (1_2)-nd travel link arm, whose second opposite-end area isrotatably engaged with a (2_2)-nd opposite-end area of the (2_2)-ndtravel link arm, and whose second center area has a rotation drivingmotor built thereon, wherein the rotation driving motor is sealinglyengaged with the substrate transfer robot, for transferring a substrate,by a rotation drive shaft having a hollow formed therein.

As one example, the transfer robot coupling part further includes acompliance part formed at one of the second one-end area and the secondopposite-end area, wherein the compliance part changes, within thetransfer robot coupling part, one of a position at which the (1_2)-ndopposite-end area of the (1_2)-nd travel link arm is rotatably engagedand a position at which the (2_2)-nd opposite-end area of the (2_2)-ndtravel link arm is rotatably engaged, in response to an external forceexerted.

As another example, the compliance part includes: a sliding member thatslides in a longitudinal direction of the transfer robot coupling partwithin one of the second one-end area and the second opposite-end area,and is rotatably engaged with one of the (1_2)-nd opposite-end area ofthe (1_2)-nd travel link arm and the (2_2)-nd opposite-end area of the(2_2)-nd travel link arm; and elastic members each of which is formed oneach of sliding paths located on both sides of the sliding member insideone of the second one-end area and the second opposite-end area.

As another example, the travel arm platform further includes: a firstwiring hole bridging the (1_1)-st upper space and the (1_2)-nd lowerspace; and a second wiring hole bridging the (1_1)-st upper space andthe (1_3)-rd lower space.

As another example, the travel arm platform further includes: a (1_1)-stwiring hole and a (1_2)-nd wiring hole, each bridging the (1_1)-st upperspace and one side of a body of the travel arm platform; a (2_1)-stwiring hole, bridging the (1_2)-nd lower space and the one side of thebody of the travel arm platform; a (2_2)-nd wiring hole, bridging the(1_3)-rd lower space and the one side of the body of the travel armplatform; a first sealing cover, sealing the (1_1)-st wiring hole andthe (2_1)-st wiring hole at the one side of the body of the travel armplatform; and a second sealing cover, sealing the (1_2)-nd wiring holeand the (2_2)-nd wiring hole at the one side of the body of the travelarm platform.

As another example, the elevating part further performs an action ofrotating the elevating drive shaft in addition to moving the elevatingdrive shaft up and down.

As another example, the travel robot further comprises: a first wiringfor an operation of the first travel driving motor; and a second wiringfor an operation of the second travel driving motor, wherein the firstwiring is fed into the first travel driving motor through the hollow ofthe elevating drive shaft and the hollow of the (1_1)-st drive shaft soas to prevent the first wiring from being exposed to an inner space ofthe vacuum chamber, and wherein the second wiring is fed into the secondtravel driving motor through the hollow of the elevating drive shaft andthe hollow of (2_1)-st drive shaft so as to prevent the second wiringfrom being exposed to the inner space of the vacuum chamber.

As another example, the travel robot is provided with a (1_1)-stintersection point, a (1_2)-nd intersection point, a (2_1)-stintersection point, a (2_2)-nd intersection point, a (3_1)-stintersection point and a (3_2)-nd intersection point, wherein the(1_1)-st intersection point is a point at which a longitudinal centerline of the travel arm platform and a longitudinal center line of the(1_1)-st travel link arm intersect, wherein the (1_2)-nd intersectionpoint is a point at which the longitudinal center line of the travel armplatform and a longitudinal center line of the (2_1)-st travel link armintersect, wherein the (2_1)-st intersection point is a point at whichthe longitudinal center line of the (1_1)-st travel link arm and alongitudinal center line of a (1_2)-nd travel link arm intersect,wherein the (2_2)-nd intersection point is a point at which thelongitudinal center line of the (2_1)-st travel link arm and alongitudinal center line of the (2_2)-nd travel link arm intersect,wherein the (3_1)-st intersection point is a point at which thelongitudinal center line of the (1_2)-nd travel link arm and alongitudinal center line of the transfer robot coupling part intersect,and wherein the (3_2)-nd intersection point is a point at which thelongitudinal center line of the (2_2)-nd travel link arm and thelongitudinal center line of the transfer robot coupling part intersect,wherein a distance between the (1_1)-st intersection point and the(1_2)-nd intersection point and a distance between the (3_1)-stintersection point and the (3_2)-nd intersection point are determined assame with each other, and a distance between the (1_1)-st intersectionpoint and the (2_1)-st intersection point, a distance between the(2_1)-st intersection point and the (3_1)-st intersection point, adistance between the (1_2)-nd intersection point and the (2_2)-ndintersection point and a distance between the (2_2)-nd intersectionpoint and the (3_2)-nd intersection point are determined as same witheach other, and wherein an absolute value of an angle formed between thetravel arm platform and the (1_1)-st travel link arm at the (1_1)-stintersection point is determined as same with an absolute value of anangle formed between the travel arm platform and the (2_1)-st travellink arm at the (1_2)-nd intersection point, an absolute value of anangle formed between the (1_1)-st travel link arm and the (1_2)-ndtravel link arm at the (2_1)-st intersection point is determined as samewith an absolute value of an angle formed between the (2_1)-st travellink arm and the (2_2)-nd travel link arm at the (2_2)-nd intersectionpoint, and an absolute value of an angle formed between the (1_2)-ndtravel link arm and the transfer robot coupling part at the (3_1)-stintersection point is determined as same with an absolute value of anangle formed between the (2_2)-nd travel link arm and the transfer robotcoupling part at the (3_2)-nd intersection point.

As another example, the first travel driving motor and the second traveldriving motor operate in an identical manner, but rotate in oppositedirections from each other.

As another example, the substrate transfer robot includes: a transferarm platform through which a (2_1)-st coupling hole, a (2-2)-nd couplinghole and a (2_3)-rd coupling hole are formed respectively at a thirdcenter area, a third one-end area and a third opposite-end area thereof,wherein a (2_1)-st locking member, through which a (2_1)-st through-holecorresponding to the hollow of the rotation drive shaft of the rotationdriving motor of the transfer robot coupling part is formed,compartmentalizes the (2_1)-st coupling hole into a (2_1)-st upper spacesealed by a (2_1)-st cover and a (2_1)-st lower space, wherein a(2_2)-nd locking member, through which a (2_2)-nd through-hole isformed, compartmentalizes the (2_2)-nd coupling hole into a (2_2)-ndupper space and a (2_2)-nd lower space sealed by a (2_2)-nd cover,wherein a (2_3)-rd locking member, through which a (2_3)-rd through-holeis formed, compartmentalizes the (2_3)-rd coupling hole into a (2_3)-rdupper space and a (2_3)-rd lower space sealed by a (2_3)-rd cover,wherein a link connecting member including a (1_1)-st blade and a(1_2)-nd blade for link connection is fixedly engaged at a front area,with a direction of the front area being a direction of a processingchamber from the substrate transfer robot when the substrate transferrobot is positioned to transfer a substrate to the processing chambercoupled with the vacuum chamber, and wherein the rotation drive shaft ofthe rotation driving motor inserted into the (2_1)-st lower space isfixedly engaged with the (2_1)-st locking member; a first transfer armpart including a (1_1)-st transfer link arm, a (1_2)-nd transfer linkarm, a first common link arm, a (1_1)-st subordinate link arm parallelto the (1_1)-st transfer link arm, a (1_2)-nd subordinate link armparallel to the (1_2)-nd transfer link arm, a (1_3)-rd subordinate linkarm parallel to the first common link arm, and a first end effector,wherein a first transfer driving motor and a third speed reducer,interlocked with the first transfer driving motor to reduce a rotationalspeed of the first transfer driving motor by half, are installed in asealed inner space of the (1_1)-st transfer link arm, wherein a (3_1)-stdrive shaft, having a hollow formed therein and interlocked with thethird speed reducer, and a (3_1)-st output shaft interlocked with the(3_1)-st drive shaft are sealingly installed on a (3_1)-st one-end areaof the (1_1)-st transfer link arm, wherein a (3_2)-nd drive shaft,having a hollow formed therein and interlocked with the first transferdriving motor, and a (3_2)-nd output shaft interlocked with the (3_2)-nddrive shaft are sealingly installed on a (3_1)-st opposite-end area ofthe (1_1)-st transfer link arm, wherein the (3_1)-st output shaft of the(1_1)-st transfer link arm is fixedly engaged with a (2_1)-st linkingmember that is inserted into the (2_2)-nd upper space of the transferarm platform to be fixedly engaged with the (2_2)-nd locking member,wherein a (3_2)-nd one-end area of the (1_2)-nd transfer link arm isfixedly engaged with the (3-2)-nd output shaft of the (1_1)-st transferlink arm through a first fixed coupling shaft, wherein a fourth centerarea of the first common link arm is rotatably engaged with the firstfixed coupling shaft, wherein a (3_4)-th one-end area of the (1_1)-stsubordinate link arm is rotatably engaged with the (1_1)-st blade of thelink connecting member of the transfer arm platform, and a (3_4)-thopposite-end area of the (1_1)-st subordinate link arm is rotatablyengaged with a (3_3)-rd one-end area of the first common link arm,wherein a (3_5)-th one-end area of the (1_2)-nd subordinate link arm isrotatably engaged with a (3_3)-rd opposite-end area of the first commonlink arm, wherein a (3_6)-th one-end area of the (1_3)-rd subordinatelink arm is rotatably engaged with a (3_5)-th opposite-end area of the(1_2)-nd subordinate link arm, and a (3_6)-th opposite-end area of the(1_3)-rd subordinate link arm is rotatably engaged with a (3_2)-ndopposite-end area of the (1_2)-nd transfer link arm, and wherein thefirst end effector is fixed to the (3_6)-th opposite-end area of the(1_3)-rd subordinate link arm to thereby support the substrate; and asecond transfer arm part including a (2_1)-st transfer link arm, a(2_2)-nd transfer link arm, a second common link arm, a (2_1)-stsubordinate link arm parallel to the (2_1)-st transfer link arm, a(2_2)-nd subordinate link arm parallel to the (2_2)-nd transfer linkarm, a (2_3)-rd subordinate link arm parallel to the second common linkarm, and a second end effector, wherein a second transfer driving motorand a fourth speed reducer, interlocked with the second transfer drivingmotor to reduce a rotational speed of the second transfer driving motorby half, are installed in a sealed inner space of the (2_1)-st transferlink arm, wherein a (4_1)-st drive shaft, having a hollow formed thereinand interlocked with the fourth speed reducer, and a (4_1)-st outputshaft interlocked with the (4_1)-st drive shaft are sealingly installedon a (4_1)-st one-end area of the (2_1)-st transfer link arm, wherein a(4_2)-nd drive shaft, having a hollow formed therein and interlockedwith the second transfer driving motor, and a (4_2)-nd output shaftinterlocked with the (4_2)-nd drive shaft are sealingly installed on a(4_1)-st opposite-end area of the (2_1)-st transfer link arm, whereinthe (4_1)-st output shaft of the (2_1)-st transfer link arm is fixedlyengaged with a (2_2)-nd linking member that is inserted into the(2_3)-rd upper space of the transfer arm platform to be fixedly engagedwith the (2_3)-rd locking member, wherein a (4_2)-nd one-end area of the(2_2)-nd transfer link arm is fixedly engaged with the (4-2)-nd outputshaft of the (2_1)-st transfer link arm through a second fixed couplingshaft, wherein a fifth center area of the second common link arm isrotatably engaged with the second fixed coupling shaft, wherein a(4_4)-th one-end area of the (2_1)-st subordinate link arm is rotatablyengaged with the (1_2)-nd blade of the link connecting member of thetransfer arm platform, and a (4_4)-th opposite-end area of the (2_1)-stsubordinate link arm is rotatably engaged with a (4_3)-rd one-end areaof the second common link arm, wherein a (4_5)-th one-end area of the(2_2)-nd subordinate link arm is rotatably engaged with a (4_3)-rdopposite-end area of the second common link arm, wherein a (4_6)-thone-end area of the (2_3)-rd subordinate link arm is rotatably engagedwith a (4_5)-th opposite-end area of the (2_2)-nd subordinate link arm,and a (4_6)-th opposite-end area of the (2_3)-rd subordinate link arm isrotatably engaged with a (4_2)-nd opposite-end area of the (2_2)-ndtransfer link arm, and wherein the second end effector is fixed to the(4_6)-th opposite-end area of the (2_3)-rd subordinate link arm tothereby support the substrate.

As another example, the (3_1)-st opposite-end area of the (1_1)-sttransfer link arm of the first transfer arm part is located at the frontarea of the transfer arm platform, and the (4_1)-st opposite-end area ofthe (2_1)-st transfer link arm of the second transfer arm part islocated at a rear area of the transfer arm platform.

As another example, a height of the second fixed coupling shaft is setas higher than a height of the first fixed coupling shaft such that thefirst end effector and the second end effector are positioned atdifferent heights during operations of the first end effector and thesecond end effector.

As another example, the second common link arm includes a hollow tube,corresponding to a height of the second fixed coupling shaft and havinga hollow formed therein for inserting the second fixed coupling shafttherein, wherein a (2_1)-st blade including the (4_3)-rd one-end area isfixedly coupled with a lower area of the hollow tube and a (2_2)-ndblade including the (4_3)-rd opposite-end area is fixedly coupled withan upper area of the hollow tube, and wherein the (4_3)-rd one-end areaand the (4_3)-rd opposite-end area with respect to a central axis of thehollow tube are lying symmetrically on each side of the central axis ofthe hollow tube when viewed from the central axis of the hollow tube.

As another example, the transfer arm platform further includes: a thirdwiring hole bridging the (2_1)-st upper space and the (2_2)-nd lowerspace; and a fourth wiring hole bridging the (2_1)-st upper space andthe (2_3)-rd lower space.

As another example, the transfer arm platform further includes: a(3_1)-st wiring hole and a (3_2)-nd wiring hole, each bridging the(2_1)-st upper space and one side of a body of the transfer armplatform; a (4_1)-st wiring hole, bridging the (2_2)-nd lower space andthe one side of the body of the transfer arm platform; a (4_2)-nd wiringhole, bridging the (2_3)-rd lower space and the one side of the body ofthe transfer arm platform; a third sealing cover, sealing the (3_1)-stwiring hole and the (4_1)-st wiring hole at the one side of the body ofthe transfer arm platform; and a fourth sealing cover, sealing the(3_2)-nd wiring hole and the (4_2)-nd wiring hole at the one side of thebody of the transfer arm platform.

As another example, the substrate transfer robot further includes: athird wiring for an operation of the first transfer driving motor; and afourth wiring for an operation of the second transfer driving motor,wherein the third wiring is fed into the first transfer driving motorthrough the hollow of the elevating drive shaft, the hollow of the(1_1)-st drive shaft, the hollow of the (1_2)-nd drive shaft, the hollowof the rotation drive shaft and the hollow of the (3_1)-st drive shaftso as to prevent the third wiring from being exposed to an inner spaceof the vacuum chamber, and wherein the fourth wiring is fed into thesecond transfer driving motor through the hollow of the elevating driveshaft, the hollow of the (2_1)-st drive shaft, the hollow of the(2_2)-nd drive shaft, the hollow of the rotation drive shaft and thehollow of the (4_1)-st drive shaft so as to prevent the fourth wiringfrom being exposed to the inner space of the vacuum chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings used to explain example embodiments of thepresent disclosure are only part of example embodiments of the presentdisclosure and other drawings can be obtained based on the drawings bythose skilled in the art of the present disclosure without inventivework.

FIG. 1 is a drawing schematically illustrating an example of acluster-type substrate processing equipment in which a travel robot isinstalled in accordance with one example embodiment of the presentdisclosure.

FIG. 2 is a drawing schematically illustrating another example of acluster-type substrate processing equipment in which the travel robot isinstalled in accordance with one example embodiment of the presentdisclosure.

FIG. 3A and FIG. 3B are drawings schematically illustrating the travelrobot in accordance with one example embodiment of the presentdisclosure.

FIG. 4A to FIG. 4C are drawings schematically illustrating a travel armplatform of the travel robot in accordance with one example embodimentof the present disclosure.

FIG. 5 is a drawing schematically illustrating a (1_1)-st travel linkarm of the travel robot in accordance with one example embodiment of thepresent disclosure.

FIG. 6 is a drawing schematically illustrating a compliance of thetravel robot in accordance with one example embodiment of the presentdisclosure.

FIG. 7 is a drawing schematically illustrating link arms of the travelrobot in accordance with one example embodiment of the presentdisclosure.

FIG. 8A and FIG. 8B are drawings schematically illustrating a substratetransfer robot to be combined with the travel robot in accordance withone example embodiment of the present disclosure.

FIG. 9A and FIG. 9B are drawings schematically illustrating a transferarm platform of the substrate transfer robot to be combined with thetravel robot in accordance with one example embodiment of the presentdisclosure.

FIG. 10 is a drawing schematically illustrating a (3_1)-st transfer linkarm of the substrate transfer robot to be combined with the travel robotin accordance with one example embodiment of the present disclosure.

FIG. 11 is a drawing schematically illustrating a connecting partbetween the (3_1)-st transfer link arm and a (3_2)-nd transfer link armof the substrate transfer robot to be combined with the travel robot inaccordance with one example embodiment of the present disclosure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The following detailed description of the present disclosure refers tothe accompanying drawings, which show by way of illustration a specificembodiment in which the present disclosure may be practiced, in order toclarify the objects, technical solutions and advantages of the presentdisclosure. These embodiments are described in sufficient detail toenable those skilled in the art to practice the present disclosure.

In the following detailed description, reference is made to theaccompanying drawings that show, by way of illustration, specificembodiments in which the invention may be practiced. These embodimentsare described in sufficient detail to enable those skilled in the art topractice the invention. It is to be understood that the variousembodiments of the present disclosure, although different, are notnecessarily mutually exclusive. For example, a particular feature,structure, or characteristic described herein in connection with oneembodiment may be implemented within other embodiments without departingfrom the spirit and scope of the present disclosure. In addition, it isto be understood that the position or arrangement of individual elementswithin each disclosed embodiment may be modified without departing fromthe spirit and scope of the present disclosure. The following detaileddescription is, therefore, not to be taken in a limiting sense, and thescope of the present disclosure is defined only by the appended claims,appropriately interpreted, along with the full range of equivalents towhich the claims are entitled. In the drawings, like numerals refer tothe same or similar functionality throughout the several views.

To allow those skilled in the art to carry out the present disclosureeasily, the example embodiments of the present disclosure will beexplained by referring to attached diagrams in detail as shown below.

FIG. 1 and FIG. 2 are drawings schematically illustrating a cluster-typesubstrate processing equipment in which a travel robot is installed inaccordance with one example embodiment of the present disclosure.

FIG. 1 shows a substrate processing equipment having four processchambers PC1, PC2, PC3, and PC4 installed at a vacuum chamber which is atransfer chamber of an octagonal structure, wherein each of the fourprocess chambers is made to place two substrates S1 and S2 thereon.Herein, the travel robot 1000 is fixedly installed at a specificlocation P1 in the vacuum chamber VC and moves a substrate transferrobot for transferring a substrate in order to account for an offsetdistance generated between locations of each of the two substrates ineach of the process chambers.

As an example, given that the travel robot 1000 has moved and positionedthe substrate transfer robot at a first position P2 which corresponds toa first substrate position, i.e., a position of a first substrate S1, ina specific process chamber PC1, the travel robot 1000 may rotate thesubstrate transfer robot to let the substrate transfer robot face thefirst substrate position so that the substrate transfer robot is able toload or unload the substrate onto or from the first substrate position.

Also, given that the travel robot 1000 has moved the substrate transferrobot and positioned the substrate transfer robot at a second positionP3 which corresponds to a second substrate position, i.e., a position ofa second substrate S2, in the specific process chamber PC1, the travelrobot 1000 may rotate the substrate transfer robot to let the substratetransfer robot face the second substrate position so that the substratetransfer robot is able to load or unload the substrate onto or from thesecond substrate position.

On the other hand, FIG. 2 shows a substrate processing equipment with avacuum chamber, i.e., a transfer chamber of a tetragonal structure,having two process chambers on each of its two sides, i.e., PC1 and PC2on one side and PC3 and PC4 on the other side, wherein each of the fourprocess chambers is made to place two substrates S1 and S2 thereon.Herein, the travel robot 1000 is fixedly installed at a specificlocation P1 in the vacuum chamber VC, and the substrate transfer robotis shifted around in order to account for different locations of each ofthe process chambers and different locations of each of the twosubstrates in each of the process chambers.

As an example, given that the travel robot 1000 has moved the substratetransfer robot and positioned the substrate transfer robot at a firstposition P2 which corresponds to a first substrate position, i.e., aposition of the first substrate S1, in a first process chamber PC1, thetravel robot 1000 may rotate the substrate transfer robot to let thesubstrate transfer robot face the first substrate position so that thesubstrate transfer robot is able to load or unload the substrate onto orfrom the first substrate position.

Also, given that the travel robot 1000 has moved the substrate transferrobot and positioned the substrate transfer robot at a second positionP5 which corresponds to a second substrate position, i.e., a position ofa second substrate S2, in a second process chamber PC2, the travel robot1000 may rotate the substrate transfer robot to let the substratetransfer robot face the second substrate position so that the substratetransfer robot is able to load or unload onto or from the substrate fromthe second substrate position.

FIG. 1 and FIG. 2 are respectively illustrating examples of thesubstrate processing equipment having the octagonal structure and thetetragonal structure, but the present disclosure is not limited theretoand the travel robot 1000 in accordance with one example embodiment ofthe present disclosure may be fixedly installed at a specific locationof a vacuum chamber of various structures to thereby move the substratetransfer robot along various set travel routes. Adding to this, thetravel robot 1000 in accordance with one example embodiment of thepresent disclosure is able to perform rotation movements at itsinstalled location so that various travel routes for the substratetransfer robot may be set based on combinations of a rotation angle ofthe travel robot 1000, a travel position of the substrate transfer robotand a rotation angle of the substrate transfer robot.

FIG. 3A and FIG. 3B are drawings schematically illustrating the travelrobot 1000 in accordance with one example embodiment of the presentdisclosure.

Hereinafter, expressions “coupled with” and “engaged with” are usedinterchangeably to explain configurations where two components arecombined, or combined to be moved together, within the travel robot,between the travel robot and the substrate transfer robot, or within thesubstrate transfer robot, according to corresponding explanations wherethe respective expressions are used.

By referring to FIG. 3A and FIG. 3B, the travel robot 1000 may includean elevating part 100 and a robot body 200 that is coupled with an upperregion of the elevating part 100 and coupled with a lower region of asubstrate transfer robot 2000.

First, the elevating part 100 may be located in a lower outer region ofa housing VC, sealing an inside of the vacuum chamber, and have itsupper end sealed to a vacuum chamber through-hole formed on a lowerregion of the housing VC, wherein the elevating part 100 may allow anelevating drive shaft 101 having a hollow formed therein to be moved upand down through the vacuum chamber through-hole. Through this, thetravel robot 1000 may adjust a vertical position of the substratetransfer robot 2000 so that the substrate transfer robot 2000 ispositioned at an appropriate height for loading or unloading thesubstrate onto or from the process chamber and the like.

In addition to vertically moving the elevating drive shaft 101, theelevating part 100 may further perform an operation of rotating theelevating drive shaft 101. Through this, the travel robot 1000 may movethe substrate transfer robot 2000 in various directions according to arotation angle of the elevating part 100.

Next, the robot body 200 may include a travel arm platform 210 coupledwith the elevating part 100, a first travel arm part 220 and a secondtravel arm part 250 which are coupled with the travel arm platform 210symmetrically to each other, and a transfer robot coupling part 280which is coupled with the first travel arm part 220 and the secondtravel arm part 250 and supports the substrate transfer robot 2000 fortransferring the substrate. Herein, the substrate transfer robot 2000may be moved within the vacuum chamber by making the transfer robotcoupling part 280 move forward and backward with operations of the firsttravel arm part 220 and the second travel arm part 250.

Through this, in a state where the travel robot 1000 has been fixed at aspecific position in the vacuum chamber, the travel robot 1000 may movethe transfer robot coupling part 280 in linear directions, i.e., inforward and backward directions, with the operations of the first travelarm part 220 and the second travel arm part 250 so that the substratetransfer robot 2000 coupled with the transfer robot coupling part 280 ismoved along with the transfer robot coupling part 280 and moved to a setposition such as a position for loading or unloading the substrate ontoor from the process chamber, etc. Also, the travel robot 1000 may adjusta vertical position of the substrate transfer robot 2000 by a verticalmovement of the elevating part 100 so that the substrate transfer robot2000 is able to load or unload the substrate onto or from the processchamber, etc.

The travel robot 1000 in accordance with one example embodiment of thepresent disclosure is further described in detail as follows.

First, the travel arm platform 210 may be coupled with the elevatingpart 100.

Herein, by referring to FIG. 4A and FIG. 4B, the travel arm platform 210may include a (1_1)-st coupling hole 211 formed at a first center area,a (1_2)-nd coupling hole 212 formed at a first one-end area, and a(1_3)-rd coupling hole 213 formed at a first opposite-end area.

The (1_1)-st coupling hole 211 at the first center area may becompartmentalized into a (1_1)-st upper space 211_1 and a (1_1)-st lowerspace 211_2 by a (1_1)-st locking member that has a (1_1)-stthrough-hole corresponding to the hollow of the elevating drive shaft101 of the evaluating part 100, and the (1_1)-st upper space 211_1 maybe sealed by a (1_1)-st cover 214.

In addition, the (1_2)-nd coupling hole 212 at the first one-end areamay be compartmentalized into a (1_2)-nd upper space 212_1 and a(1_2)-nd lower space 212_2 by a (1_2)-nd locking member that has a(1_2)-nd through-hole, and the (1_2)-nd lower space 212_2 may be sealedby a (1_2)-nd cover 215.

Further, the (1_3)-rd coupling hole 213 at the first opposite-end areamay be compartmentalized into a (1_3)-rd upper space 213_1 and a(1_3)-rd lower space 213_2 by a (1_3)-rd locking member that has a(1_3)-rd through-hole, and the (1_3)-rd lower space 213_2 may be sealedby a (1_3)-rd cover 216.

Also, the travel arm platform 210 may be coupled with the elevating part100, and more specifically, the elevating drive shaft 101 of theelevating part 100 may be inserted into the (1_1)-st lower space 211_2of the (1_1)-st coupling hole 211 so that the elevating drive shaft 101is fixedly engaged with the (1_1)-st locking member. Herein, when theelevating drive shaft 101 is fixedly engaged with the (1_1)-st lockingmember, sealing at a coupling area between the elevating drive shaft 101and the (1_1)-st locking member may be improved by adding sealingmembers such as an O-ring, a gasket, etc. Since a configuration ofadding the sealing members, such as the O-ring, the gasket, etc., may besimilarly applied to other coupling parts to be described hereinafter, adescription thereof is omitted in the following description of thepresent disclosure.

Through this, exposure to an external environment through the hollow ofthe elevating drive shaft 101 may be sealed away, at the (1_1)-stcoupling hole 211, from a vacuum environment of the inside of the vacuumchamber.

Meanwhile, wiring holes for introducing wirings that are insertedthrough the hollow of the elevating drive shaft 101 of the elevatingpart 100 into the first travel arm part 220 and the second travel armpart 250 may be formed on the travel arm platform 210.

That is, a (1_1)-st wiring hole h11 and a (1_2)-nd wiring hole h12, eachbridging the (1_1)-st upper space 211_1 and one side of a body of thetravel arm platform 210 may be formed. Also, a (2_1)-st wiring hole h21,bridging the (1_2)-nd lower space 212_2 and the one side of the body ofthe travel arm platform 210, and a (2_2)-nd wiring hole h22, bridgingthe (1_3)-rd lower space 213_2 and the one side of the body of thetravel arm platform 210, may be formed.

In addition, for sealing the wiring holes, a first sealing cover 217that seals the (1_1)-st wiring hole h11 and the (2_1)-st wiring hole h21at the one side of the body of the travel arm platform 210 and a secondsealing cover 218 that seals the (1_2)-nd wiring hole h12 and the(2_2)-nd wiring hole h22 at the one side of the body of the travel armplatform 210 may be provided.

Further, by referring to FIG. 4C, the wiring holes for introducing thewirings that are inserted through the hollow of the elevating driveshaft 101 of the elevating part 100 into the first travel arm part 220and the second travel arm part 250 may also be formed inside the travelarm platform 210.

That is, within the body of the travel arm platform 210, a first wiringhole h3, bridging the (1_1)-st upper space 211_1 and the (1_2)-nd lowerspace 212_2, and a second wiring hole h4, bridging the (1_1)-st upperspace 211_1 and the (1_3)-rd lower space 213_2, may be formed so thatthe inside of the travel arm platform 210 is sealed without usingadditional sealing members.

Next, a (1_1)-st travel link arm 230 of the first travel arm part 220may be engaged with the travel arm platform 210 at the (1_2)-nd couplinghole 212 of the travel arm platform 210. Also, a (2_1)-st travel linkarm 260 of the second travel arm part 250 may be engaged with the travelarm part platform 210 at the (1_3)-rd coupling hole 213 of the travelarm platform 210.

Herein, by referring to FIG. 5 , the (1_1)-st travel link arm 230 of thefirst travel arm part 220 may have a sealed inner space, and a firsttravel driving motor 231 and a first speed reducer 232, interlocked withthe first travel driving motor 231 to reduce a rotational speed of thefirst travel driving motor 231 by half, may be installed in the sealedinner space of the (1_1)-st travel link arm 230.

Also, a (1_1)-st drive shaft 233, having a hollow formed therein andinterlocked with the first speed reducer 232, and a (1_1)-st outputshaft 234 interlocked with the (1_1)-st drive shaft 233 may be sealinglyinstalled on a (1_1)-st one-end area of the (1_1)-st travel link arm230. Further, a (1_2)-nd drive shaft 236, having a hollow formed thereinand interlocked with the first travel driving motor 231, and a (1_2)-ndoutput shaft 237 interlocked with the (1_2)-nd drive shaft 236 may besealingly installed on a (1_1)-st opposite-end area of the (1_1)-sttravel link arm 230. Herein, the interlocking between the first traveldriving motor 231 and the first speed reducer 232, the interlockingbetween the first speed reducer 232 and the (1_1)-st drive shaft 233 andthe interlocking between the first travel driving motor 231 and the(1_2)-nd drive shaft 236 may be respectively achieved by using a pulleymethod, but the present disclosure is not limited thereto, and variousmethods, such as a gear method, etc., may be used for transmittingrotational force. Also, the (1_1)-st drive shaft 233 and the (1_1)-stoutput shaft 234, and the (1_2)-nd drive shaft 236 and the (1_2)-ndoutput shaft 237 may each be formed with a speed reducer having a samespeed reduction ratio with each other. Adding to this, the (1_1)-stoutput shaft 234 and the (1_2)-nd output shaft 237 may rotate inopposite directions from each other.

Further, the (1_1)-st output shaft 234 that is installed at the (1_1)-stone-end area of the (1_1)-st travel link arm 230 of the first travel armpart 220 may be inserted into the (1_2)-nd upper space 212_1 of the(1_2)-nd coupling hole 212 of the travel arm platform 210 so as to befixedly engaged with the (1_2)-nd locking member.

Herein, a (1_1)-st linking member 235 may be used for coupling the(1_1)-st output shaft 234 and the (1_2)-nd locking member, wherein the(1_1)-st linking member 235 may be a tube-shaped shaft having its lengthextended by a distance between the (1_1)-st output shaft 234 and the(1_2)-nd locking member at a location where the travel arm platform 210and the (1_1)-st travel link arm 230 are coupled, and both ends of the(1_1)-st linking member 235 may be fixedly coupled with the (1_1)-stoutput shaft 234 and the (1_2)-nd locking member respectively.

Also, a (2_2)-nd travel link arm 270 of the second travel arm part 250may be configured similarly to the (1_1)-st link arm 230 of the firsttravel arm part 220 described with reference to FIG. 5 .

That is, the (2_1)-st travel link arm 260 of the second travel arm part250 may have a sealed inner space, and a second travel driving motor anda second speed reducer, interlocked with the second travel driving motorto reduce a rotational speed of the second travel driving motor by half,may be installed in the sealed inner space of the (2_1)-st travel linkarm 260.

In addition, a (2_1)-st drive shaft, having a hollow formed therein andinterlocked with the second speed reducer, and a (2_1)-st output shaftinterlocked with the (2_1)-st drive shaft may be sealingly installed ona (2_1)-st one-end area of the (2_1)-st travel link arm 260. Further, a(2_2)-nd drive shaft, having a hollow formed therein and interlockedwith the second travel driving motor, and a (2_2)-nd output shaftinterlocked with the (2_2)-nd drive shaft may be sealingly installed ona (2_1)-st opposite-end area of the (2_1)-st travel link arm 260.Herein, the interlocking between the second travel driving motor and thesecond speed reducer, the interlocking between the second speed reducerand the (2_1)-st drive shaft and the interlocking between the secondtravel driving motor and the (2_2)-nd drive shaft may be respectively beachieved by using the pulley method, but the present disclosure is notlimited thereto, and various methods, such as the gear method, etc., maybe used for transmitting the rotational force. Also, the (2_1)-st driveshaft and the (2_1)-st output shaft, and the (2_2)-nd drive shaft andthe (2_2)-nd output shaft may each be formed with a speed reducer havinga same speed reduction ratio with each other. Adding to this, the(2_1)-st output shaft and the (2_2)-nd output shaft 237 may rotate inopposite directions from each other.

Further, the (2_1)-st output shaft that is installed at the (2_1)-stone-end area of the (2_1)-st travel link arm 260 of the second travelarm part 250 may be inserted into the (1_3)-rd upper space of the(1_3)-rd coupling hole 213 of the travel arm platform 210 so as to befixedly engaged with the (1_3)-rd locking member.

Herein, a (1_2)-nd linking member may be used for coupling the (2_1)-stoutput shaft and the (1_3)-rd locking member, wherein the (1_2)-ndlinking member may be a tube-shaped shaft having its length extended bya distance between the (2_1)-st output shaft and the (1_3)-rd lockingmember at a location where the travel arm platform 210 and the (2_1)-sttravel link arm 260 are coupled, and both ends of the (1_2)-nd linkingmember may be fixedly coupled with the (2_1)-st output shaft and the(1_3)-rd locking member respectively.

Next, the (1_2)-nd output shaft 237 of the (1_1)-st travel link arm 230of the first travel arm part 220 may be fixedly engaged with a (1_2)-ndone-end area of a (1_2)-nd travel link arm 240, and the (2_2)-nd outputshaft of the (2_1)-st travel link arm 260 of the second travel arm part250 may be fixedly engaged with a (2_2)-nd one-end area of the (2_2)-ndtravel link arm 270.

Herein, a linking member may be used for coupling the (1_2)-nd outputshaft 237 and the (1_2)-nd one-end area, wherein the linking member 238may be a tube-shaped shaft having its length extended by a distancebetween the (1_2)-nd output shaft 237 and a coupling region of the(1_2)-nd one-end area to be connected to the (1_2)-nd output shaft 237at a location where the (1_1)-st travel link arm 230 and the (1_2)-ndtravel link arm 240 are coupled, and both ends of the linking member 238may be fixedly coupled with the (1_2)-nd output shaft 237 and thecoupling region of the (1_2)-nd one-end area respectively. Also, anotherlinking member may be used for coupling the (2_2)-nd output shaft andthe (2_2)-nd one-end area, wherein the linking member may be atube-shaped shaft having its length extended by a distance between the(2_2)-nd output shaft and a coupling region of the (2_2)-nd one-end areato be connected to the (2_2)-nd output shaft at a location where the(2_1)-st travel link arm 260 and the (2_2)-nd travel link arm 270 arecoupled, and both ends of the linking member may be fixedly coupled withthe (2_2)-nd output shaft and the coupling region of the (2_2)-ndone-end area respectively.

Next, the transfer robot coupling part 280 may be coupled with the(1_2)-nd travel link arm 240 and the (2_2)-nd travel link arm 270.

That is, a second one-end area of the transfer robot coupling part 280may be rotatably engaged with a (1_2)-nd opposite-end area of the(1_2)-nd travel link arm 240, and a second opposite-end area of thetransfer robot coupling part 280 may be rotatably engaged with a(2_2)-nd opposite-end area of the (2_2)-nd travel link arm 270.

In addition, at a second center area of the transfer robot coupling part280, a rotation driving motor including a rotation drive shaft 281,having a hollow formed therein, may be sealingly formed, and thesubstrate transfer robot 2000, for transferring the substrate, may besealingly engaged with the rotation drive shaft 281 having the hollowformed therein.

Also, at one of the second one-end area and the second opposite-end areaof the transfer robot coupling part 280, a compliance part 282 whichchanges, within the transfer robot coupling part 280, one of a positionat which the (1_2)-nd opposite-end area of the (1_2)-nd travel link arm240 is rotatably engaged and a position at which the (2_2)-ndopposite-end area of the (2_2)-nd travel link arm 270 is rotatablyengaged, in response to an external force exerted, may be formed.

Herein, by referring to FIG. 6 , the compliance part 282 may include asliding member 283 that slides in a longitudinal direction of thetransfer robot coupling part 280 within one of the second one-end areaand the second opposite-end area, and is rotatably engaged with one ofthe (1_2)-nd opposite-end area of the (1_2)-nd travel link arm 240 andthe (2_2)-nd opposite-end area of the (2_2)-nd travel link arm 270.Also, the compliance part 282 may include elastic members 284 each ofwhich is formed on each of sliding paths located on both sides of thesliding member 283 inside one of the second one-end area and the secondopposite-end area. However, the compliance part 282 in accordance withthe present disclosure may be implemented in various ways, such as acylinder form using hydraulic pressure, apart from the configurationusing the elastic members.

Meanwhile, by referring to FIG. 7 , the travel robot 1000 may beprovided with a (1_1)-st intersection point C1, a (1_2)-nd intersectionpoint C2, a (2_1)-st intersection point C3, a (2_2)-nd intersectionpoint C4, a (3_1)-st intersection point C5 and a (3_2)-nd intersectionpoint C6, wherein the (1_1)-st intersection point C1 is a point at whicha longitudinal center line of the travel arm platform 210 and alongitudinal center line of the (1_1)-st travel link arm 230 intersect,wherein the (1_2)-nd intersection point C2 is a point at which thelongitudinal center line of the travel arm platform 210 and alongitudinal center line of the (2_1)-st travel link arm 260 intersect,wherein the (2_1)-st intersection point C3 is a point at which thelongitudinal center line of the (1_1)-st travel link arm 230 and alongitudinal center line of a (1_2)-nd travel link arm 240 intersect,wherein the (2_2)-nd intersection point C4 is a point at which thelongitudinal center line of the (2_1)-st travel link arm 260 and alongitudinal center line of the (2_2)-nd travel link arm 270 intersect,wherein the (3_1)-st intersection point C5 is a point at which thelongitudinal center line of the (1_2)-nd travel link arm 240 and alongitudinal center line of the transfer robot coupling part 280intersect, and wherein the (3_2)-nd intersection point C6 is a point atwhich the longitudinal center line of the (2_2)-nd travel link arm 270and the longitudinal center line of the transfer robot coupling part 280intersect. Herein, a distance between the (1_1)-st intersection point C1and the (1_2)-nd intersection point C2 and a distance between the(3_1)-st intersection point C5 and the (3_2)-nd intersection point C6may be set to be same with each other. Also, a distance between the(1_1)-st intersection point C1 and the (2_1)-st intersection point C3, adistance between the (2_1)-st intersection point C3 and the (3_1)-stintersection point C5, a distance between the (1_2)-nd intersectionpoint C2 and the (2_2)-nd intersection point C5 and a distance betweenthe (2_2)-nd intersection point C4 and the (3_2)-nd intersection pointC6 may be set to be same with each other

In addition, an absolute value of an angle formed between the travel armplatform 210 and the (1_1)-st travel link arm 230 at the (1_1)-stintersection point C1 may be set to be same with an absolute value of anangle formed between the travel arm platform 210 and the (2_1)-st travellink arm 260 at the (1_2)-nd intersection point C2. Also, an absolutevalue of an angle formed between the (1_1)-st travel link arm 230 andthe (1_2)-nd travel link arm 240 at the (2_1)-st intersection point C3may be set to be same with an absolute value of an angle formed betweenthe (2_1)-st travel link arm 260 and the (2_2)-nd travel link arm 270 atthe (2_2)-nd intersection point C4. Further, an absolute value of anangle formed between the (1_2)-nd travel link arm 240 and the transferrobot coupling part 280 at the (3_1)-st intersection point C5 may be setto be same with an absolute value of an angle formed between the(2_2)-nd travel link arm 270 and the transfer robot coupling part 280 atthe (3_2)-nd intersection point C6.

Through this, the travel robot 1000 may move the substrate transferrobot 2000 supported by the transfer robot coupling part 280 forward orbackward in along a linear path.

Herein, the first travel driving motor 231 installed on the (1_1)-sttravel link arm 230 and the second travel driving motor installed on the(2_1)-st travel link arm 260 may operate in a similar manner, but rotatein opposite directions from each other.

Also, a first wiring for an operation of the first travel driving motor231 and a second wiring for an operation of the second travel drivingmotor may be respectively disposed in an enclosed space inside thetravel robot 1000.

Herein, the first wiring is fed into the first travel driving motor 231through the hollow of the elevating drive shaft 101 and the hollow ofthe (1_1)-st drive shaft 233 so as to prevent the first wiring frombeing exposed to an inner space of the vacuum chamber. In addition, thesecond wiring is fed into the second travel driving motor through thehollow of the elevating drive shaft 101 and the hollow of (2_1)-st driveshaft so as to prevent the second wiring from being exposed to the innerspace of the vacuum chamber. Meanwhile, the first wiring and the secondwiring may be respectively branched from the elevating drive shaft 101into the first travel arm part 220 and the second travel arm part 250through a wiring hole formed at the travel arm platform 210.

Next, the substrate transfer robot 2000 corresponding to the travelrobot 1000 in accordance with one example embodiment of the presentdisclosure may be described as follows.

By referring to FIG. 8A and FIG. 8B, the substrate transfer robot 2000may include a transfer arm platform 2100 engaged with the transfer robotcoupling part 280, and may include a first transfer arm part 2200 and asecond transfer arm part 2300 that are engaged with the transfer armplatform 2100. Herein, the first transfer arm part 2200 and the secondtransfer arm part 2300 may be respectively engaged with a first endeffector 2400 and a second end effector 2500.

Through this, the substrate transfer robot 2000 may be moved to aparticular location by traveling within the vacuum chamber by operationsof the first travel arm part 220 and the second travel arm part 250 ofthe travel robot 1000 or by additional rotational movement of theelevating part 100 of the travel robot 1000. Further, in a state wherethe first end effector 2400 or the second end effector 2500 ispositioned at a loading position of the substrate or an unloadingposition of the substrate by the vertical movement of the elevating part100, the first end effector 2400 or the second end effector 2500 mayload or unload the substrate by the operations of the first transfer armpart 2200 or the second transfer arm part 2300.

First, by referring to FIG. 9A and FIG. 9B, the transfer arm platform2100 may include a (2_1)-st coupling hole 2110 formed at a third centerarea, a (2-2)-nd coupling hole 2120 formed at a third one-end area, anda (2_3)-rd coupling hole 2130 formed at a third opposite-end area. Thetransfer arm platform 2100 may have a configuration similar to that ofthe travel arm platform 210 of the travel robot 1000.

The (2_1)-st coupling hole 2110 at the third center area may becompartmentalized into a (2_1)-st upper space and a (2_1)-st lower spaceby a (2_1)-st locking member that has a (2_1)-st through-holecorresponding to the hollow of the rotation drive shaft 281 of therotation driving motor of the transfer robot coupling part 280, and the(2_1)-st upper space may be sealed by a (2_1)-st cover.

In addition, the (2_2)-nd coupling hole 2120 at the third one-end areamay be compartmentalized into a (2_2)-nd upper space and a (2_2)-ndlower space by a (2_2)-nd locking member that has a (2_2)-ndthrough-hole, and the (2_2)-nd lower space is sealed by a (2_2)-ndcover.

Further, the (2_3)-rd coupling hole 2130 at the third opposite-end areamay be compartmentalized into a (2_3)-rd upper space and a (2_3)-rdlower space by a (2_3)-rd locking member that has a (2_3)-rdthrough-hole, and the (2_3)-rd lower space may be sealed by a (2_3)-rdcover.

Also, the transfer arm platform 2100 may have a link connecting member2190 including a (1_1)-st blade 2191 and a (1_2)-nd blade 2192 for linkconnection that is fixedly engaged at its front area. Herein, adirection of the front area may be a direction of a processing chamberfrom the substrate transfer robot 2000 when the substrate transfer robot2000 is positioned to transfer the substrate to the processing chambercoupled with the vacuum chamber.

Also, the transfer arm platform 2100 may be engaged with the travelrobot 1000, and more specifically, the rotation drive shaft 281 of therotation driving motor of the travel robot 1000 may be inserted into the(2_1)-st lower space of the (2_1)-st coupling hole 2110 so that therotation drive shaft 281 is fixedly engaged with the (2_1)-st lockingmember. Herein, when the rotation drive shaft 281 is fixedly engagedwith the (2_1)-st locking member, sealing at a coupling area between therotation drive shaft 281 and the (2_1)-st locking member may be improvedby adding the sealing members such as the O-ring, the gasket, etc. Sincethe configuration of adding the sealing members, such as the O-ring, thegasket, etc., may be similarly applied to other coupling parts to bedescribed hereinafter, a description thereof is omitted in the followingdescription of the present disclosure.

Through this, exposure to an external environment through the hollow ofthe rotation drive shaft 281 may be sealed away, at the (2_1)-stcoupling hole 2110, from the vacuum environment of the inside of thevacuum chamber.

Meanwhile, wiring holes for introducing wirings that are insertedthrough the hollow of the rotation drive shaft 281 of the travel robot1000 into the first transfer arm part 2200 and the second transfer armpart 2300 may be formed on the transfer arm platform 2100.

That is, a (3_1)-st wiring hole h110 and a (3_2)-nd wiring hole h120,each bridging the (2_1)-st upper space and one side of a body of thetransfer arm platform 2100 may be formed. Also, a (4_1)-st wiring holeh210, bridging the (2_2)-nd lower space and the one side of the body ofthe transfer arm platform 2100, and a (4_2)-nd wiring hole h220,bridging the (2_3)-rd lower space and the one side of the body of thetransfer arm platform 2100, may be formed.

In addition, for sealing the wiring holes, a third sealing cover 2170that seals the (3_1)-st wiring hole h110 and the (4_1)-st wiring holeh210 at the one side of the body of the transfer arm platform 2100 and afourth sealing cover 2180 that seals the (3_2)-nd wiring hole h120 andthe (3_2)-nd wiring hole h220 at the one side of the body of thetransfer arm platform 2100 may be provided.

Further, the wiring holes for introducing the wirings that are insertedthrough the hollow of the rotation drive shaft 281 of the travel robot1000 into the first transfer arm part 2200 and the second transfer armpart 2300 may also be formed inside the transfer arm platform 2100.

That is, within the body of the transfer arm platform 2100, a thirdwiring hole, bridging the (2_1)-st upper space and the (2_2)-nd lowerspace, and a fourth wiring hole, bridging the (2_1)-st upper space andthe (2_3)-rd lower space, may be formed so that the inside of thetransfer arm platform 2100 is sealed without using additional sealingmembers.

Next, a (1_1)-st transfer link arm 2210 of the first transfer arm part2200 may be engaged with the transfer arm platform 2100 at the (2_2)-ndcoupling hole 2120 of the transfer arm platform 2100. Also, a (2_1)-sttransfer link arm 2310 of the second transfer arm part 2300 may beengaged with the transfer arm part platform 2100 at the (2_3)-rdcoupling hole 2130 of the transfer arm platform 2100.

Herein, by referring to FIG. 10 , the (1_1)-st transfer link arm 2210 ofthe first transfer arm part 2200 may have a sealed inner space, and afirst transfer driving motor 2211 and a third speed reducer 2212,interlocked with the first transfer driving motor 2211 to reduce arotational speed of the first transfer driving motor 2211 by half, maybe installed in the sealed inner space of the (1_1)-st transfer link arm2210.

Also, a (3_1)-st drive shaft 2213, having a hollow formed therein andinterlocked with the third speed reducer 2212, and a (3_1)-st outputshaft 2214 interlocked with the (3_1)-st drive shaft 2213 may besealingly installed on a (3_1)-st one-end area of the (1_1)-st transferlink arm 2210. Further, a (3_2)-nd drive shaft 2216, having a hollowformed therein and interlocked with the first transfer driving motor2211, and a (3_2)-nd output shaft 2217 interlocked with the (3_2)-nddrive shaft 2216 may be sealingly installed on a (3_1)-st opposite-endarea of the (1_1)-st transfer link arm 2210. Herein, the interlockingbetween the first transfer driving motor 2211 and the third speedreducer 2212, the interlocking between the third speed reducer 2212 andthe (3_1)-st drive shaft 2213 and the interlocking between the firsttransfer driving motor 2211 and the (3_2)-nd drive shaft 2216 may berespectively achieved by using the pulley method, but the presentdisclosure is not limited thereto, and various methods, such as the gearmethod, etc., may be used for transmitting rotational force. Also, the(3_1)-st drive shaft 2213 and the (3_1)-st output shaft 2214, and the(3_2)-nd drive shaft 2216 and the (3_2)-nd output shaft 2217 may each beformed with a speed reducer having a same speed reduction ratio witheach other. Adding to this, the (3_1)-st output shaft 2214 and the(3_2)-nd output shaft 2217 may rotate in opposite directions from eachother.

Further, the (3_1)-st output shaft 2214 that is installed at the(3_1)-st one-end area of the (1_1)-st transfer link arm 2210 of thefirst transfer arm part 2200 may be inserted into the (2_2)-nd upperspace of the (2_2)-nd coupling hole 2120 of the transfer arm platform2100 so as to be fixedly engaged with the (2_2)-nd locking member.

Herein, a (2_1)-st linking member 2215 may be used for coupling the(3_1)-st output shaft 2214 and the (2_2)-nd locking member, wherein the(2_1)-st linking member 2215 may be a tube-shaped shaft having itslength extended by a distance between the (3_1)-st output shaft 2214 andthe (2_2)-nd locking member at a location where the transfer armplatform 2100 and the (1_1)-st transfer link arm 2210 are coupled, andboth ends of the (2_1)-st linking member 2215 may be fixedly coupledwith the (3_1)-st output shaft 2214 and the (2_2)-nd locking memberrespectively.

Also, the (3_2)-nd output shaft 2217 of the (1_1)-st transfer link arm2210 of the first transfer arm part 2200 may be fixedly engaged with a(3_2)-nd one-end area of a (1_2)-nd transfer link arm 2220.

Herein, a first fixed coupling shaft 2218 may be used for coupling the(3_2)-nd output shaft 2217 and the (3_2)-nd one-end area, wherein thefirst fixed coupling shaft 2218 may be a tube-shaped shaft having itslength extended by a distance between the (3_2)-nd output shaft 2217 anda coupling region of the (3_2)-nd one-end area to be connected to the(3_2)-nd output shaft 2217 at a location where the (1_1)-st transferlink arm 2210 and the (1_2)-nd transfer link arm 2220 are coupled, andboth ends of the first fixed coupling shaft 2218 may be fixedly coupledwith the (3_2)-nd output shaft 2217 and the coupling region of the(3_2)-nd one-end area respectively.

In addition, a first common link arm 2230 may be installed at a locationwhere the (3_2)-nd output shaft 2217 and the (3_2)-nd one-end area arecoupled.

That is, by referring to FIG. 11 , a fourth center area of the firstcommon link arm 2230 may be rotatably engaged with the first fixedcoupling shaft 2218 that couples the (3_2)-nd output shaft 2217 and the(3_2)-nd one-end area.

Also, the first transfer arm part 2200 may include a (1_1)-stsubordinate link arm 2240 that is in parallel with the (1_1)-st transferlink arm 2210, wherein a (3_4)-th one-end area of the (1_1)-stsubordinate link arm 2240 may be rotatably engaged with the (1_1)-stblade 2191 of the link connecting member 2190 of the transfer armplatform 2100, and a (3_4)-th opposite-end area of the (1_1)-stsubordinate link arm 2240 may be rotatably engaged with a (3_3)-rdone-end area of the first common link arm 2230.

Additionally, the first transfer arm part 2200 may include a (1_2)-ndsubordinate link arm 2250 that is in parallel with the (1_2)-nd transferlink arm 2220, wherein a (3_5)-th one-end area of the (1_2)-ndsubordinate link arm 2250 may be rotatably engaged with a (3_3)-rdopposite-end area of the first common link arm 2230.

Further, the first transfer arm part 2200 may include a (1_3)-rdsubordinate link arm 2260 that is in parallel with the first common linkarm 2230, wherein a (3_6)-th one-end area of the (1_3)-rd subordinatelink arm 2260 may be rotatably engaged with a (3_5)-th opposite-end areaof the (1_2)-nd subordinate link arm 2250, and a (3_6)-th opposite-endarea of the (1_3)-rd subordinate link arm 2260 may be rotatably engagedwith a (3_2)-nd opposite-end area of the (1_2)-nd transfer link arm2220.

Also, the first transfer arm part 2200 may include the first endeffector 2400, and the first end effector 2400 may be fixed to the(3_6)-th opposite-end area of the (1_3)-rd subordinate link arm 2260 tothereby support the substrate.

The first transfer arm part 2200 configured as above may make the firstend effector 2400 move forward and backward along a straight line byeach of the transfer arms and the subordinate arms according to anoperation of the first transfer driving motor 2211. Accordingly, thesubstrate may be loaded or unloaded at a position set by the first endeffector 2400.

Meanwhile, the second transfer arm part 2300 may be configured similarlyas the first transfer arm part 2200, and the first transfer arm part2200 and the second transfer arm part 2300 may be installed on thetransfer arm platform 2100 so as to be symmetrical to each other withrespect to a central region of the transfer arm platform 2100.

That is, the (2_1)-st transfer link arm 2310 of the second transfer armpart 2300 may have a sealed inner space, and a second transfer drivingmotor and a fourth speed reducer, interlocked with the second transferdriving motor to reduce a rotational speed of the second transferdriving motor by half, may be installed in the sealed inner space of the(2_1)-st transfer link arm 2310.

Also, a (4_1)-st drive shaft, having a hollow formed therein andinterlocked with the fourth speed reducer, and a (4_1)-st output shaftinterlocked with the (4_1)-st drive shaft may be sealingly installed ona (4_1)-st one-end area of the (2_1)-st transfer link arm 2310. Further,a (4_2)-nd drive shaft, having a hollow formed therein and interlockedwith the second transfer driving motor, and a (4_2)-nd output shaftinterlocked with the (4_2)-nd drive shaft may be sealingly installed ona (4_1)-st opposite-end area of the (2_1)-st transfer link arm 2310.Herein, the interlocking between the second transfer driving motor andthe fourth speed reducer, the interlocking between the fourth speedreducer and the (4_1)-st drive shaft and the interlocking between thesecond transfer driving motor and the (4_2)-nd drive shaft may berespectively achieved by using the pulley method, but the presentdisclosure is not limited thereto, and various methods, such as the gearmethod, etc., may be used for transmitting rotational force. Also, the(4_1)-st drive shaft and the (4_1)-st output shaft, and the (4_2)-nddrive shaft and the (4_2)-nd output shaft may each be formed with aspeed reducer having a same speed reduction ratio with each other.Adding to this, the (4_1)-st output shaft and the (4_2)-nd output shaftmay rotate in opposite directions from each other.

Further, the (4_1)-st output shaft that is installed at the (4_1)-stone-end area of the (2_1)-st transfer link arm 2310 of the secondtransfer arm part 2300 may be inserted into the (2_3)-rd upper space ofthe (2_3)-rd coupling hole 2130 of the transfer arm platform 2100 so asto be fixedly engaged with the (2_3)-rd locking member.

Herein, a (2_2)-nd linking member may be used for coupling the (4_1)-stoutput shaft and the (2_3)-rd locking member, wherein the (2_2)-ndlinking member may be a tube-shaped shaft having its length extended bya distance between the (4_1)-st output shaft and the (2_3)-rd lockingmember at a location where the transfer arm platform 2100 and the(2_1)-st transfer link arm 2310 are coupled, and both ends of the(2_2)-nd linking member may be fixedly coupled with the (4_1)-st outputshaft and the (2_3)-rd locking member respectively.

Also, the (4_2)-nd output shaft of the (2_1)-st transfer link arm 2310of the second transfer arm part 2300 may be fixedly engaged with a(4_2)-nd one-end area of a (2_2)-nd transfer link arm 2320.

Herein, a second fixed coupling shaft may be used for coupling the(4_2)-nd output shaft and the (4_2)-nd one-end area, wherein the secondfixed coupling part may be a tube-shaped shaft having its lengthextended by a distance between the (4_2)-nd output shaft and a couplingregion of the (4_2)-nd one-end area to be connected to the (4_2)-ndoutput shaft at a location where the (2_1)-st transfer link arm 2310 andthe (2_2)-nd transfer link arm 2320 are coupled, and both ends of thesecond fixed coupling shaft may be fixedly coupled with the (4_2)-ndoutput shaft and the coupling region of the (4_2)-nd one-end arearespectively.

In addition, a second common link arm 2330 may be installed at alocation where the (4_2)-nd output shaft and the (4_2)-nd one-end areaare coupled.

That is, a fifth center area of the second common link arm 2330 may berotatably engaged with the second fixed coupling shaft that couples the(4_2)-nd output shaft and the (4_2)-nd one-end area.

Also, the second transfer arm part 2300 may include a (2_1)-stsubordinate link arm 2340 that is in parallel with the (2_1)-st transferlink arm 2310, wherein a (4_4)-th one-end area of the (2_1)-stsubordinate link arm 2340 may be rotatably engaged with the (1_2)-ndblade 2192 of the link connecting member 2190 of the transfer armplatform 2100, and a (4_4)-th opposite-end area of the (2_1)-stsubordinate link arm 2340 may be rotatably engaged with a (4_3)-rdone-end area of the second common link arm 2330.

Additionally, the second transfer arm part 2300 may include a (2_2)-ndsubordinate link arm 2350 that is in parallel with the (2_2)-nd transferlink arm 2320, wherein a (4_5)-th one-end area of the (2_2)-ndsubordinate link arm 2350 may be rotatably engaged with a (4_3)-rdopposite-end area of the second common link arm 2330.

Further, the second transfer arm part 2300 may include a (2_3)-rdsubordinate link arm 2360 that is in parallel with the second commonlink arm 2330, wherein a (4_6)-th one-end area of the (2_3)-rdsubordinate link arm 2360 may be rotatably engaged with a (4_5)-thopposite-end area of the (2_2)-nd subordinate link arm 2350, and a(4_6)-th opposite-end area of the (2_3)-rd subordinate link arm 2360 maybe rotatably engaged with a (4_2)-nd opposite-end area of the (2_2)-ndtransfer link arm 2320.

Also, the second transfer arm part 2300 may include the second endeffector 2500, and the second end effector 2500 may be fixed to the(4_6)-th opposite-end area of the (2_3)-rd subordinate link arm 2360 tothereby support the substrate.

The second transfer arm part 2300 configured as above may make thesecond end effector 2500 move forward and backward along a straight lineby each of the transfer arms and the subordinate arms according to anoperation of the second transfer driving motor. Accordingly, thesubstrate may be loaded or unloaded at a position set by the second endeffector 2500.

Herein, the (3_1)-st opposite-end area of the (1_1)-st transfer link arm2210 of the first transfer arm part 2200 and the (4_1)-st opposite-endarea of the (2_1)-st transfer link arm 2310 of the second transfer armpart 2300 may be identically located at the front area or a rear area ofthe transfer arm platform 2100.

Also, unlike this, the (3_1)-st opposite-end area of the (1_1)-sttransfer link arm 2210 of the first transfer arm part 2200 may belocated at the front area of the transfer arm platform 2100, while the(4_1)-st opposite-end area of the (2_1)-st transfer link arm 2310 of thesecond transfer arm part 2300 may be located at the rear area of thetransfer arm platform 2100.

In addition, a height of the second fixed coupling shaft, coupling the(2_1)-st transfer link arm 2310 of the second transfer arm part 2300 andthe (2_2)-nd transfer link arm 2320 of the second transfer arm part2300, may be set as higher than a height of the first fixed couplingshaft 2218, coupling the (1_1)-st transfer link arm 2210 of the firsttransfer arm part 2200 and the (1_2)-nd transfer link arm 2220 of thefirst transfer arm part 2200, such that the first end effector 2400 ofthe first transfer arm part 2200 and the second end effector 2500 of thesecond transfer arm part 2300 may be positioned at different heightsduring operations of the first end effector 2400 and the second endeffector 2500.

Further, the second common link arm 2330 that couples the (2_1)-sttransfer link arm 2310 of the second transfer arm part 2300 and the(2_2)-nd transfer link arm 2320 of the second transfer arm part 2300 mayinclude a hollow tube, corresponding to the height of the second fixedcoupling shaft and having a hollow formed therein for inserting thesecond fixed coupling shaft therein. Herein, a (2_1)-st blade includingthe (4_3)-rd one-end area may be fixedly coupled with a lower area ofthe hollow tube and a (2_2)-nd blade including the (4_3)-rd opposite-endarea may be fixedly coupled with an upper area of the hollow tube. Also,the (4_3)-rd one-end area and the (4_3)-rd opposite-end area withrespect to a central axis of the hollow tube may lie symmetrically oneach side of the central axis of the hollow tube when viewed from thecentral axis of the hollow tube.

In addition, a third wiring for an operation of the first transferdriving motor 2211 and a fourth wiring for an operation of the secondtransfer driving motor may be respectively disposed in an enclosed spaceinside the substrate transfer robot 2000.

Herein, the third wiring may be fed into the first transfer drivingmotor 2211 through the hollow of the elevating drive shaft 101 of theelevating part 100, the hollow of the (1_1)-st drive shaft 233 of thetravel robot 1000, the hollow of the (1_2)-nd drive shaft 236 of thetravel robot 1000, the hollow of the rotation drive shaft 281 of thetravel robot 1000 and the hollow of the (3_1)-st drive shaft 2213 of thesubstrate transfer robot 2000 so as to prevent the third wiring frombeing exposed to the inner space of the vacuum chamber. Also, the fourthwiring may be fed into the second transfer driving motor through thehollow of the elevating drive shaft 101 of the elevating part 100, thehollow of the (2_1)-st drive shaft of the travel robot 1000, the hollowof the (2_2)-nd drive shaft of the travel robot 1000, the hollow of therotation drive shaft 281 of the travel robot 1000 and the hollow of the(4_1)-st drive shaft of the substrate transfer robot 2000 so as toprevent the fourth wiring from being exposed to the inner space of thevacuum chamber. Meanwhile, the third wiring and the fourth wiring may berespectively branched from the rotation drive shaft 281 into the firsttransfer arm part 2200 and the second transfer arm part 2300 through awiring hole formed at the transfer arm platform 2100.

Meanwhile, although a characteristic configuration of the substratetransfer robot supported by the travel robot 1000 is been describedabove, the present disclosure is not limited to the configuration of thesubstrate transfer robot described above, and all types of substratetransfer robots that transfer substrates inside the vacuum chamber maybe coupled with the travel robot, so as to perform the traveling of thesubstrate transfer robot inside the vacuum chamber by the travel robotand the substrate transfer inside the vacuum chamber by the substratetransfer robot.

In addition, although the transfer of the substrate has been describedabove, the present disclosure may also be applied to a transfer of masksnecessary for processing the substrates.

The present disclosure has an effect of installing the travel robot inthe vacuum chamber to thereby enable the moving of the substratetransfer robot that transfers the substrate within the vacuum chamber.

The present disclosure has another effect of facilitating easyinstallation of the travel robot in the vacuum chamber without having toinstall a separate structure for creating a transport path by buildingthe travel robot in a link arm structure.

The present disclosure has still another effect of facilitating easymaintenance of the travel robot by installing the travel robot that isbuilt of the link arm structure instead of installing the separatestructure for creating the transport path.

The present disclosure has still yet another effect of forming a drivingunit of the travel robot in a sealed structure and forming wiringrequired for the operation of the driving unit inside the travel robotso that possible pollution sources are blocked in advance and a vacuumstate of the vacuum chamber is maintained.

As seen above, the present disclosure has been explained by specificmatters such as detailed components, limited embodiments, and drawings.While the invention has been shown and described with respect to thepreferred embodiments, it, however, will be understood by those skilledin the art that various changes and modification may be made withoutdeparting from the spirit and scope of the invention as defined in thefollowing claims.

Accordingly, the thought of the present disclosure must not be confinedto the explained embodiments, and the following patent claims as well aseverything including variations equal or equivalent to the patent claimspertain to the category of the thought of the present disclosure.

What is claimed is:
 1. A travel robot for moving a substrate transferrobot in a vacuum chamber, comprising: an elevating part which islocated in a lower outer region of a housing, sealing an inside of thevacuum chamber, and has its upper end sealed to a vacuum chamberthrough-hole formed on a lower region of the housing, wherein theelevating part allows an elevating drive shaft having a hollow formedtherein to be moved up and down through the vacuum chamber through-hole;a travel arm platform through which a (1_1)-st coupling hole, a (1-2)-ndcoupling hole and a (1_3)-rd coupling hole are formed respectively at afirst center area, a first one-end area and a first opposite-end areathereof, wherein a (1_1)-st locking member, through which a (1_1)-stthrough-hole corresponding to the hollow of the elevating drive shaft isformed, compartmentalizes the (1_1)-st coupling hole into a (1_1)-stupper space sealed by a (1_1)-st cover and a (1_1)-st lower space,wherein a (1_2)-nd locking member, through which a (1_2)-nd through-holeis formed, compartmentalizes the (1_2)-nd coupling hole into a (1_2)-ndupper space and a (1_2)-nd lower space sealed by a (1_2)-nd cover,wherein a (1_3)-rd locking member, through which a (1_3)-rd through-holeis formed, compartmentalizes the (1_3)-rd coupling hole into a (1_3)-rdupper space and a (1_3)-rd lower space sealed by a (1_3)-rd cover, andwherein the elevating drive shaft inserted into the (1_1)-st lower spaceis fixedly engaged with the (1_1)-st locking member; a first travel armpart including a (1_1)-st travel link arm and a (1_2)-nd travel linkarm, wherein a first travel driving motor and a first speed reducer,interlocked with the first travel driving motor to reduce a rotationalspeed of the first travel driving motor by half, are installed in asealed inner space of the (1_1)-st travel link arm, wherein a (1_1)-stdrive shaft, having a hollow formed therein and interlocked with thefirst speed reducer, and a (1_1)-st output shaft interlocked with the(1_1)-st drive shaft are sealingly installed on a (1_1)-st one-end areaof the (1_1)-st travel link arm, wherein a (1_2)-nd drive shaft, havinga hollow formed therein and interlocked with the first travel drivingmotor, and a (1_2)-nd output shaft interlocked with the (1_2)-nd driveshaft are sealingly installed on a (1_1)-st opposite-end area of the(1_1)-st travel link arm, wherein the (1_1)-st output shaft of the(1_1)-st travel link arm is fixedly engaged with a (1_1)-st linkingmember that is inserted into the (1_2)-nd upper space of the travel armplatform to be fixedly engaged with the (1_2)-nd locking member, andwherein a (1_2)-nd one-end area of the (1_2)-nd travel link arm isfixedly engaged with the (1_2)-nd output shaft of the (1_1)-st travellink arm; a second travel arm part including a (2_1)-st travel link armand a (2_2)-nd travel link arm, wherein a second travel driving motorand a second speed reducer, interlocked with the second travel drivingmotor to reduce a rotational speed of the second travel driving motor byhalf, are installed in a sealed inner space of the (2_1)-st travel linkarm, wherein a (2_1)-st drive shaft, having a hollow formed therein andinterlocked with the second speed reducer, and a (2_1)-st output shaftinterlocked with the (2_1)-st drive shaft are sealingly installed on a(2_1)-st one-end area of the (2_1)-st travel link arm, wherein a(2_2)-nd drive shaft, having a hollow formed therein and interlockedwith the second travel driving motor, and a (2_2)-nd output shaftinterlocked with the (2_2)-nd drive shaft are sealingly installed on a(2_1)-st opposite-end area of the (2_1)-st travel link arm, wherein the(2_1)-st output shaft of the (2_1)-st travel link arm is fixedly engagedwith a (1_2)-nd linking member that is inserted into the (1_3)-rd upperspace of the travel arm platform to be fixedly engaged with the (1_3)-rdlocking member, and wherein a (2_2)-nd one-end area of the (2_2)-ndtravel link arm is fixedly engaged with the (2_2)-nd output shaft of the(2_1)-st travel link arm; and a transfer robot coupling part whosesecond one-end area is rotatably engaged with a (1_2)-nd opposite-endarea of the (1_2)-nd travel link arm, whose second opposite-end area isrotatably engaged with a (2_2)-nd opposite-end area of the (2_2)-ndtravel link arm, and whose second center area has a rotation drivingmotor built thereon, wherein the rotation driving motor is sealinglyengaged with the substrate transfer robot, for transferring a substrate,by a rotation drive shaft having a hollow formed therein.
 2. The travelrobot of claim 1, wherein the transfer robot coupling part furtherincludes a compliance part formed at one of the second one-end area andthe second opposite-end area, wherein the compliance part changes,within the transfer robot coupling part, one of a position at which the(1_2)-nd opposite-end area of the (1_2)-nd travel link arm is rotatablyengaged and a position at which the (2_2)-nd opposite-end area of the(2_2)-nd travel link arm is rotatably engaged, in response to anexternal force exerted.
 3. The travel robot of claim 2, wherein thecompliance part includes: a sliding member that slides in a longitudinaldirection of the transfer robot coupling part within one of the secondone-end area and the second opposite-end area, and is rotatably engagedwith one of the (1_2)-nd opposite-end area of the (1_2)-nd travel linkarm and the (2_2)-nd opposite-end area of the (2_2)-nd travel link arm;and elastic members each of which is formed on each of sliding pathslocated on both sides of the sliding member inside one of the secondone-end area and the second opposite-end area.
 4. The travel robot ofclaim 1, wherein the travel arm platform further includes: a firstwiring hole bridging the (1_1)-st upper space and the (1_2)-nd lowerspace; and a second wiring hole bridging the (1_1)-st upper space andthe (1_3)-rd lower space.
 5. The travel robot of claim 1, wherein thetravel arm platform further includes: a (1_1)-st wiring hole and a(1_2)-nd wiring hole, each bridging the (1_1)-st upper space and oneside of a body of the travel arm platform; a (2_1)-st wiring hole,bridging the (1_2)-nd lower space and the one side of the body of thetravel arm platform; a (2_2)-nd wiring hole, bridging the (1_3)-rd lowerspace and the one side of the body of the travel arm platform; a firstsealing cover, sealing the (1_1)-st wiring hole and the (2_1)-st wiringhole at the one side of the body of the travel arm platform; and asecond sealing cover, sealing the (1_2)-nd wiring hole and the (2_2)-ndwiring hole at the one side of the body of the travel arm platform. 6.The travel robot of claim 1, wherein the elevating part further performsan action of rotating the elevating drive shaft in addition to movingthe elevating drive shaft up and down.
 7. The travel robot of claim 1,further comprising: a first wiring for an operation of the first traveldriving motor; and a second wiring for an operation of the second traveldriving motor, wherein the first wiring is fed into the first traveldriving motor through the hollow of the elevating drive shaft and thehollow of the (1_1)-st drive shaft so as to prevent the first wiringfrom being exposed to an inner space of the vacuum chamber, and whereinthe second wiring is fed into the second travel driving motor throughthe hollow of the elevating drive shaft and the hollow of (2_1)-st driveshaft so as to prevent the second wiring from being exposed to the innerspace of the vacuum chamber.
 8. The travel robot of claim 1, wherein thetravel robot is provided with a (1_1)-st intersection point, a (1_2)-ndintersection point, a (2_1)-st intersection point, a (2_2)-ndintersection point, a (3_1)-st intersection point and a (3_2)-ndintersection point, wherein the (1_1)-st intersection point is a pointat which a longitudinal center line of the travel arm platform and alongitudinal center line of the (1_1)-st travel link arm intersect,wherein the (1_2)-nd intersection point is a point at which thelongitudinal center line of the travel arm platform and a longitudinalcenter line of the (2_1)-st travel link arm intersect, wherein the(2_1)-st intersection point is a point at which the longitudinal centerline of the (1_1)-st travel link arm and a longitudinal center line of a(1_2)-nd travel link arm intersect, wherein the (2_2)-nd intersectionpoint is a point at which the longitudinal center line of the (2_1)-sttravel link arm and a longitudinal center line of the (2_2)-nd travellink arm intersect, wherein the (3_1)-st intersection point is a pointat which the longitudinal center line of the (1_2)-nd travel link armand a longitudinal center line of the transfer robot coupling partintersect, and wherein the (3_2)-nd intersection point is a point atwhich the longitudinal center line of the (2_2)-nd travel link arm andthe longitudinal center line of the transfer robot coupling partintersect, wherein a distance between the (1_1)-st intersection pointand the (1_2)-nd intersection point and a distance between the (3_1)-stintersection point and the (3_2)-nd intersection point are determined assame with each other, and a distance between the (1_1)-st intersectionpoint and the (2_1)-st intersection point, a distance between the(2_1)-st intersection point and the (3_1)-st intersection point, adistance between the (1_2)-nd intersection point and the (2_2)-ndintersection point and a distance between the (2_2)-nd intersectionpoint and the (3_2)-nd intersection point are determined as same witheach other, and wherein an absolute value of an angle formed between thetravel arm platform and the (1_1)-st travel link arm at the (1_1)-stintersection point is determined as same with an absolute value of anangle formed between the travel arm platform and the (2_1)-st travellink arm at the (1_2)-nd intersection point, an absolute value of anangle formed between the (1_1)-st travel link arm and the (1_2)-ndtravel link arm at the (2_1)-st intersection point is determined as samewith an absolute value of an angle formed between the (2_1)-st travellink arm and the (2_2)-nd travel link arm at the (2_2)-nd intersectionpoint, and an absolute value of an angle formed between the (1_2)-ndtravel link arm and the transfer robot coupling part at the (3_1)-stintersection point is determined as same with an absolute value of anangle formed between the (2_2)-nd travel link arm and the transfer robotcoupling part at the (3_2)-nd intersection point.
 9. The travel robot ofclaim 1, wherein the first travel driving motor and the second traveldriving motor operate in an identical manner, but rotate in oppositedirections from each other.
 10. The travel robot of claim 1, wherein thesubstrate transfer robot includes: a transfer arm platform through whicha (2_1)-st coupling hole, a (2-2)-nd coupling hole and a (2_3)-rdcoupling hole are formed respectively at a third center area, a thirdone-end area and a third opposite-end area thereof, wherein a (2_1)-stlocking member, through which a (2_1)-st through-hole corresponding tothe hollow of the rotation drive shaft of the rotation driving motor ofthe transfer robot coupling part is formed, compartmentalizes the(2_1)-st coupling hole into a (2_1)-st upper space sealed by a (2_1)-stcover and a (2_1)-st lower space, wherein a (2_2)-nd locking member,through which a (2_2)-nd through-hole is formed, compartmentalizes the(2_2)-nd coupling hole into a (2_2)-nd upper space and a (2_2)-nd lowerspace sealed by a (2_2)-nd cover, wherein a (2_3)-rd locking member,through which a (2_3)-rd through-hole is formed, compartmentalizes the(2_3)-rd coupling hole into a (2_3)-rd upper space and a (2_3)-rd lowerspace sealed by a (2_3)-rd cover, wherein a link connecting memberincluding a (1_1)-st blade and a (1_2)-nd blade for link connection isfixedly engaged at a front area, with a direction of the front areabeing a direction of a processing chamber from the substrate transferrobot when the substrate transfer robot is positioned to transfer asubstrate to the processing chamber coupled with the vacuum chamber, andwherein the rotation drive shaft of the rotation driving motor insertedinto the (2_1)-st lower space is fixedly engaged with the (2_1)-stlocking member; a first transfer arm part including a (1_1)-st transferlink arm, a (1_2)-nd transfer link arm, a first common link arm, a(1_1)-st subordinate link arm parallel to the (1_1)-st transfer linkarm, a (1_2)-nd subordinate link arm parallel to the (1_2)-nd transferlink arm, a (1_3)-rd subordinate link arm parallel to the first commonlink arm, and a first end effector, wherein a first transfer drivingmotor and a third speed reducer, interlocked with the first transferdriving motor to reduce a rotational speed of the first transfer drivingmotor by half, are installed in a sealed inner space of the (1_1)-sttransfer link arm, wherein a (3_1)-st drive shaft, having a hollowformed therein and interlocked with the third speed reducer, and a(3_1)-st output shaft interlocked with the (3_1)-st drive shaft aresealingly installed on a (3_1)-st one-end area of the (1_1)-st transferlink arm, wherein a (3_2)-nd drive shaft, having a hollow formed thereinand interlocked with the first transfer driving motor, and a (3_2)-ndoutput shaft interlocked with the (3_2)-nd drive shaft are sealinglyinstalled on a (3_1)-st opposite-end area of the (1_1)-st transfer linkarm, wherein the (3_1)-st output shaft of the (1_1)-st transfer link armis fixedly engaged with a (2_1)-st linking member that is inserted intothe (2_2)-nd upper space of the transfer arm platform to be fixedlyengaged with the (2_2)-nd locking member, wherein a (3_2)-nd one-endarea of the (1_2)-nd transfer link arm is fixedly engaged with the(3-2)-nd output shaft of the (1_1)-st transfer link arm through a firstfixed coupling shaft, wherein a fourth center area of the first commonlink arm is rotatably engaged with the first fixed coupling shaft,wherein a (3_4)-th one-end area of the (1_1)-st subordinate link arm isrotatably engaged with the (1_1)-st blade of the link connecting memberof the transfer arm platform, and a (3_4)-th opposite-end area of the(1_1)-st subordinate link arm is rotatably engaged with a (3_3)-rdone-end area of the first common link arm, wherein a (3_5)-th one-endarea of the (1_2)-nd subordinate link arm is rotatably engaged with a(3_3)-rd opposite-end area of the first common link arm, wherein a(3_6)-th one-end area of the (1_3)-rd subordinate link arm is rotatablyengaged with a (3_5)-th opposite-end area of the (1_2)-nd subordinatelink arm, and a (3_6)-th opposite-end area of the (1_3)-rd subordinatelink arm is rotatably engaged with a (3_2)-nd opposite-end area of the(1_2)-nd transfer link arm, and wherein the first end effector is fixedto the (3_6)-th opposite-end area of the (1_3)-rd subordinate link armto thereby support the substrate; and a second transfer arm partincluding a (2_1)-st transfer link arm, a (2_2)-nd transfer link arm, asecond common link arm, a (2_1)-st subordinate link arm parallel to the(2_1)-st transfer link arm, a (2_2)-nd subordinate link arm parallel tothe (2_2)-nd transfer link arm, a (2_3)-rd subordinate link arm parallelto the second common link arm, and a second end effector, wherein asecond transfer driving motor and a fourth speed reducer, interlockedwith the second transfer driving motor to reduce a rotational speed ofthe second transfer driving motor by half, are installed in a sealedinner space of the (2_1)-st transfer link arm, wherein a (4_1)-st driveshaft, having a hollow formed therein and interlocked with the fourthspeed reducer, and a (4_1)-st output shaft interlocked with the (4_1)-stdrive shaft are sealingly installed on a (4_1)-st one-end area of the(2_1)-st transfer link arm, wherein a (4_2)-nd drive shaft, having ahollow formed therein and interlocked with the second transfer drivingmotor, and a (4_2)-nd output shaft interlocked with the (4_2)-nd driveshaft are sealingly installed on a (4_1)-st opposite-end area of the(2_1)-st transfer link arm, wherein the (4_1)-st output shaft of the(2_1)-st transfer link arm is fixedly engaged with a (2_2)-nd linkingmember that is inserted into the (2_3)-rd upper space of the transferarm platform to be fixedly engaged with the (2_3)-rd locking member,wherein a (4_2)-nd one-end area of the (2_2)-nd transfer link arm isfixedly engaged with the (4-2)-nd output shaft of the (2_1)-st transferlink arm through a second fixed coupling shaft, wherein a fifth centerarea of the second common link arm is rotatably engaged with the secondfixed coupling shaft, wherein a (4_4)-th one-end area of the (2_1)-stsubordinate link arm is rotatably engaged with the (1_2)-nd blade of thelink connecting member of the transfer arm platform, and a (4_4)-thopposite-end area of the (2_1)-st subordinate link arm is rotatablyengaged with a (4_3)-rd one-end area of the second common link arm,wherein a (4_5)-th one-end area of the (2_2)-nd subordinate link arm isrotatably engaged with a (4_3)-rd opposite-end area of the second commonlink arm, wherein a (4_6)-th one-end area of the (2_3)-rd subordinatelink arm is rotatably engaged with a (4_5)-th opposite-end area of the(2_2)-nd subordinate link arm, and a (4_6)-th opposite-end area of the(2_3)-rd subordinate link arm is rotatably engaged with a (4_2)-ndopposite-end area of the (2_2)-nd transfer link arm, and wherein thesecond end effector is fixed to the (4_6)-th opposite-end area of the(2_3)-rd subordinate link arm to thereby support the substrate.
 11. Thetravel robot of claim 10, wherein the (3_1)-st opposite-end area of the(1_1)-st transfer link arm of the first transfer arm part is located atthe front area of the transfer arm platform, and the (4_1)-stopposite-end area of the (2_1)-st transfer link arm of the secondtransfer arm part is located at a rear area of the transfer armplatform.
 12. The travel robot of claim 10, wherein a height of thesecond fixed coupling shaft is set as higher than a height of the firstfixed coupling shaft such that the first end effector and the second endeffector are positioned at different heights during operations of thefirst end effector and the second end effector.
 13. The travel robot ofclaim 10, wherein the second common link arm includes a hollow tube,corresponding to a height of the second fixed coupling shaft and havinga hollow formed therein for inserting the second fixed coupling shafttherein, wherein a (2_1)-st blade including the (4_3)-rd one-end area isfixedly coupled with a lower area of the hollow tube and a (2_2)-ndblade including the (4_3)-rd opposite-end area is fixedly coupled withan upper area of the hollow tube, and wherein the (4_3)-rd one-end areaand the (4_3)-rd opposite-end area with respect to a central axis of thehollow tube are lying symmetrically on each side of the central axis ofthe hollow tube when viewed from the central axis of the hollow tube.14. The travel robot of claim 10, wherein the transfer arm platformfurther includes: a third wiring hole bridging the (2_1)-st upper spaceand the (2_2)-nd lower space; and a fourth wiring hole bridging the(2_1)-st upper space and the (2_3)-rd lower space.
 15. The travel robotof claim 10, wherein the transfer arm platform further includes: a(3_1)-st wiring hole and a (3_2)-nd wiring hole, each bridging the(2_1)-st upper space and one side of a body of the transfer armplatform; a (4_1)-st wiring hole, bridging the (2_2)-nd lower space andthe one side of the body of the transfer arm platform; a (4_2)-nd wiringhole, bridging the (2_3)-rd lower space and the one side of the body ofthe transfer arm platform; a third sealing cover, sealing the (3_1)-stwiring hole and the (4_1)-st wiring hole at the one side of the body ofthe transfer arm platform; and a fourth sealing cover, sealing the(3_2)-nd wiring hole and the (4_2)-nd wiring hole at the one side of thebody of the transfer arm platform.
 16. The travel robot of claim 10,wherein the substrate transfer robot further includes: a third wiringfor an operation of the first transfer driving motor; and a fourthwiring for an operation of the second transfer driving motor, whereinthe third wiring is fed into the first transfer driving motor throughthe hollow of the elevating drive shaft, the hollow of the (1_1)-stdrive shaft, the hollow of the (1_2)-nd drive shaft, the hollow of therotation drive shaft and the hollow of the (3_1)-st drive shaft so as toprevent the third wiring from being exposed to an inner space of thevacuum chamber, and wherein the fourth wiring is fed into the secondtransfer driving motor through the hollow of the elevating drive shaft,the hollow of the (2_1)-st drive shaft, the hollow of the (2_2)-nd driveshaft, the hollow of the rotation drive shaft and the hollow of the(4_1)-st drive shaft so as to prevent the fourth wiring from beingexposed to the inner space of the vacuum chamber.